nanoScratch Testing: An Overview

Nanoscratch testing is a versatile tool for analysis of both thin films and bulk materials. Nanoscratch testing provides the capability to investigate modes of deformation and fracture that are not possible using stadard indentation techniques. Nanoscratching is accomplished by applying a normal load in a controlled fashion while measuring the force required moving the tip laterally across the sample. By selecting the appropriate normal loading profile and lateral displacement pattern, many different types of tests can be performed. The damage incurred from the test is then typically observed using optical or Scanning Probe Microscopy (SPM imaging).

Nanoscratch of a low-k film, showing evidence of film failure.